JPH0160944B2 - - Google Patents

Info

Publication number
JPH0160944B2
JPH0160944B2 JP55189543A JP18954380A JPH0160944B2 JP H0160944 B2 JPH0160944 B2 JP H0160944B2 JP 55189543 A JP55189543 A JP 55189543A JP 18954380 A JP18954380 A JP 18954380A JP H0160944 B2 JPH0160944 B2 JP H0160944B2
Authority
JP
Japan
Prior art keywords
data
semiconductor device
image
processing
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55189543A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57113356A (en
Inventor
Masahito Nakajima
Tetsuo Hizuka
Masato Myamura
Jushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18954380A priority Critical patent/JPS57113356A/ja
Publication of JPS57113356A publication Critical patent/JPS57113356A/ja
Publication of JPH0160944B2 publication Critical patent/JPH0160944B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP18954380A 1980-12-30 1980-12-30 Article inspection system Granted JPS57113356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18954380A JPS57113356A (en) 1980-12-30 1980-12-30 Article inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18954380A JPS57113356A (en) 1980-12-30 1980-12-30 Article inspection system

Publications (2)

Publication Number Publication Date
JPS57113356A JPS57113356A (en) 1982-07-14
JPH0160944B2 true JPH0160944B2 (en]) 1989-12-26

Family

ID=16243064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18954380A Granted JPS57113356A (en) 1980-12-30 1980-12-30 Article inspection system

Country Status (1)

Country Link
JP (1) JPS57113356A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357138U (en]) * 1989-10-09 1991-05-31

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942436A (ja) * 1982-08-09 1984-03-09 Sumitomo Electric Ind Ltd 圧着端子の検査方法
JPS61193053A (ja) * 1985-02-22 1986-08-27 Hitachi Ltd 画像処理による検査の方法
JP2609594B2 (ja) * 1986-11-28 1997-05-14 株式会社日立製作所 欠陥検査装置
JPH04263233A (ja) * 1991-02-18 1992-09-18 Ushio Kk 画像処理装置
CN110118777A (zh) * 2019-04-30 2019-08-13 北京航天自动控制研究所 一种控制系统系统集成智能检验台

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588347A (en) * 1978-12-27 1980-07-04 Fujitsu Ltd Automatic aligning system
JPS55165647A (en) * 1979-06-11 1980-12-24 Mitsubishi Electric Corp Device for automatically detecting whether wire bonding position is right or wrong

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357138U (en]) * 1989-10-09 1991-05-31

Also Published As

Publication number Publication date
JPS57113356A (en) 1982-07-14

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